000			01555das a2200349Ia 4500
003			MX-MoT
005			20210908173252.0
008			910114c19909999cauar 1 a0eng d
010			_a96643156
022	0		_a1078-8743
040			_aCSL _cCSL _dOCL _dMYG _dNSD _dDLC _dWAU _dDLC _dMYG _dOUN _dXVF
050	1	4	_aTK7871.85 _b.I25a
111	2		_aIEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
245	1	0	_aASMC ... proceedings / _cIEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop.
246	1	3	_aProceedings
260			_aNew York, NY : _bIEEE, _cc1990-
265			_aIEEE Service Center, 445 Hoes Lane, Piscataway, NJ 08855-1331.
300			_av. : _bil. ; _c28 cm.
310			_aAnual
500			_aAlgunas números tienen algún título distintivo.
500			_aPublished: Mountain View, CA : SEMI, 1993-
550			_aSponsored by: Semiconductor Equipment and Materials International, the IEEE Electron Devices Society, and the IEEE Components, Hybrids & Manufacturing Technology Society
650		4	_aSemiconductores _xDiseño y construcción _vCongresos.
650		4	_aSemiconductores _xIndustria _vCongresos.
650		0	_aSemiconductors _xDesign and construction _vCongresses
650		0	_aSemiconductor industry _vCongresses
710	2		_aInstitute of Electrical and Electronics Engineers
710	2		_aSemiconductor Equipment and Materials International.
710	2		_aIEEE Electron Devices Society.
710	2		_aIEEE Components, Hybrids, and Manufacturing Technology Society
942			_cCR
999			_c43194 _d43194